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Product descriptions
Based on the know-how and technology accumulated for a long time in semiconductor CVD and ETCH processes, we are responding to various needs of customers and doing our best to make small requests.
MATTSON ASPEN3
MATTSON Aspen-3
Selectively remove mask pattern material from wafer surface to support repair and modification of components for maintenance and repair of Aspen-3 equipment responsible for producing desired pattern on wafer surface.
MATTSON SUPREMA
MATTSON SUPREMA
After the patterning process is completed, it supports repair and modification of components for maintenance and repair of SUPREMA equipment, which is responsible for removing the masking layer from the wafer.
MATTSON RTP
MATTSON RTP
Mattson RTP for equipment HIGH CURRET POWER SUPPLY.
Rorze Robot
RORZE ROBOT
We support the repair of the Rorze robot used for the Wafer Transfer.
IGS GAS BOX
IGS GAS BOX
The Gas Box used for gas supply is renovated and overhauled to efficiently free up space and reduce costs.
CERAMIC PARTS
CERAMIC PARTS
Fabrication and supply of ceramic material parts.
As the clean working environment of the semiconductor industry is called a clean industry has a great influence on quality, all repair work of HST is also carried out in a separate CLEAN ROOM and is committed to customer satisfaction.
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